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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH01225351(A)
申请公布日期
1989.09.08
申请号
JP19880052039
申请日期
1988.03.04
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORITA ISAO
分类号
H01L29/78;H01L21/8238;H01L27/08;H01L27/092
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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