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发明名称
VACUUM ARC DISCHARGE-TYPE PVD FILM FORMATION
摘要
申请公布号
JPH01263264(A)
申请公布日期
1989.10.19
申请号
JP19880089474
申请日期
1988.04.11
申请人
NISSIN ELECTRIC CO LTD
发明人
OKAMOTO KOJI
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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