| 摘要 |
PURPOSE: To improve the resolution of a resist and to make the slope of an edge remarkably sharp by incorporating a specific photosensitive compound and a compound for accelerating developing rate. CONSTITUTION: An alkali soluble resin (a), 1,2-naphthoquinone-diazide-5-sulfonyl ester (b) of trihydroxybenzene isomer and an aromatic hydroxy compound (c) are blended. The component (b) is blended so as to be at least 0.5μm<-1> in absorption coefficient to light fading absorption and the component (c) is blended so as to be 15-30wt.% of total solid. As the component (b), 1,2-naphthoquinone- diazide-5-sulfonyl trisester of 1,3,5-trihydroxy benzene is preferably used, as the component (c), 2,3,4,-trihydroxybenzophenone or the like is preferably used, and as the component (a), the novolak resin or the like can be used.
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