| 摘要 |
PURPOSE:To accurately develop a fine pattern with high reproducibility by providing a temperature controlling means which keeps the atmosphere of a developer, a substrate, and inside of sealed space at fixed temperature. CONSTITUTION:By the working of a hot water pipe 13, a temperature control system 12, and a temperature sensor 11, the temperature of the wall of a chamber 1 is kept. By the working of a hot water drum 21 and the temperature control system 12, the temperature of the developer 7 is kept. By the working of an infrared ray lamp 9 and the temperature control system 12, the temperature of the substrate 4 and the atmosphere of the lower part 1b of the chamber 1 is kept. By these controlling means, the developer 7, the substrate 4, and the atmosphere of the lower part 1b inside of the chamber 1 are controlled, e.g., at 23 deg.C. Thus, since development is performed at the fixed temperature, a fine pattern can be accurately developed with high reproducibility. |
