| 发明名称 |
SURFACE TREATMENT METHOD AND DEVICE THEREOF |
| 摘要 |
<p>i) a first step for preparing treatment bath column which consists of plural unit baths; ii) a second step for exchanging the treatment liquid in each unit bath, in order and at a time dipping a material that is not to be treated into the unit bath which is not for exchanging the treatment liquid.</p> |
| 申请公布号 |
KR900001651(B1) |
申请公布日期 |
1990.03.17 |
| 申请号 |
KR19860006125 |
申请日期 |
1986.07.26 |
| 申请人 |
DAINIPPON SCREEN MFG |
发明人 |
GOBAYASI ATUSO;YAMADA DAKUMA;AKAO KIYOSHI |
| 分类号 |
H01L21/306;B05D1/18;H01L21/00;H01L21/304;H01L21/67;H01L21/677;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/306 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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