| 摘要 |
PURPOSE:To enable a pattern containing a plurality of kinds of graphics which are enlarged or reduced by an appropriate ratio in XY axial directions to be continuously drawn by a method wherein a drawing start position, and a scan width and scan interval of a charged beam are controlled by positional information for each graphic and besides, ON and OFF of the charged beam are performed by graphic information. CONSTITUTION:A bit conversion unit 52 converts graphic information expressed by a specific format to a bit pattern data. A purpose of a deflection control unit 53 is to make an electron beam 17 scan according to transfer (positional) of a sample 10, and its scan width is suitably altered by a command from a CPU 40. A positional measurement unit 54 detects a position of the sample 10 with an X laser length measuring machine 15 and a Y laser length measuring machine not given in the figure, and outputs a deflection start command to the deflection control unit 53 following an indication from the CPU 40. Besides, the positional measurement unit 54 outputs a command for reading the bit pattern data prepared with the bit conversion unit 52. |
