| 摘要 |
PROBLEM TO BE SOLVED: To provide a mass flow rate controller for continuously inspecting calibration setting of an MFC in an actual time, while executing processes.SOLUTION: The mass flow rate controller includes: a first flowmeter designed and arranged to measure the mass flow rate passing through the mass flow rate controller; a second flowmeter designed and arranged to measure the mass flow rate passing through the mass flow rate controller; a control valve designed and arranged to control the mass flow rate passing through the mass flow rate controller according to a control signal generated as a function of the flow rate measured by one of the flowmeters; and a system controller designed and arranged to generate a control signal and issue an instruction when the difference exceeds a threshold value between the mass flow rate measured by the first flowmeter and the mass flow rate measured by the second flowmeter.SELECTED DRAWING: Figure 1 |
