发明名称 |
Positive-working photosensitive mixture and photolithographic copying material produced therefrom with o-quinone dialide sulfonyl ester and azo coupler |
摘要 |
A positive-working photosensitive mixture containing an o-quinone diazide and a binder is disclosed wherein the mixture contains a compound which is able to form an azo coupling with the o-quinone diazide. A copying material produced with the photosensitive mixture has a high photosensitivity and an exceptional developer resistance. The photosensitive mixture is used in reproduction technique, and also in the field of resists.
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申请公布号 |
US4929534(A) |
申请公布日期 |
1990.05.29 |
申请号 |
US19880236916 |
申请日期 |
1988.08.26 |
申请人 |
HOECHST AKTIENGESELLSCHAFT |
发明人 |
STEPHANI, TRUTZ-ULRICH;MOHR, DIETER;MAISEL, BRITTA;FRASS, WERNER |
分类号 |
G03C1/72;G03C1/00;G03F7/022 |
主分类号 |
G03C1/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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