发明名称 Positive-working photosensitive mixture and photolithographic copying material produced therefrom with o-quinone dialide sulfonyl ester and azo coupler
摘要 A positive-working photosensitive mixture containing an o-quinone diazide and a binder is disclosed wherein the mixture contains a compound which is able to form an azo coupling with the o-quinone diazide. A copying material produced with the photosensitive mixture has a high photosensitivity and an exceptional developer resistance. The photosensitive mixture is used in reproduction technique, and also in the field of resists.
申请公布号 US4929534(A) 申请公布日期 1990.05.29
申请号 US19880236916 申请日期 1988.08.26
申请人 HOECHST AKTIENGESELLSCHAFT 发明人 STEPHANI, TRUTZ-ULRICH;MOHR, DIETER;MAISEL, BRITTA;FRASS, WERNER
分类号 G03C1/72;G03C1/00;G03F7/022 主分类号 G03C1/72
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