| 摘要 |
The present invention is directed to a beam allocation and delivery system for an excimer laser in which substantially the full energy from such laser is delivered to a precise area or areas of a workpiece. This efficient system is achieved by the use of one or more elongated light-guides to direct the laser beam. Included therewith are means to shape and focus said beam to a reduced image on the workpiece. Preferably, the shaping and focussing is achieved by changing the cross-section of the light-guide from a first configuration to a second configuration, and by an imaging lens.
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