| 摘要 |
A low loss optical waveguide modulator, an essential component of opto-electronic integrated circuits which can combine optical and electronic devices on a single chip optical communication systems is described. The modulator in our embodiment consists of a sequence of epitaxial layers on a single crystal substrate consisting of a n+-GaAs substrate, a n+-GaAs buffer layer, a n-Al0.05Ga0.95As electrode layer, an effective i-Al0.25Ga0.75As confinement layer, an i-GaAs guiding layer, an effective i-Al0.25Ga0.75As confinement layer, a p-Al0.25Ga0.75As electrode layer and a p+-GaAs cap layer. The layers have an index of refraction profile such that the index of refraction of the confinement layers are substantially less than the index of refraction of the guiding layer and the index of refraction of the first electrode layer is substantially greater than the index of refraction of the first confinement layer.
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