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发明名称
CONTACTING DEVICE FOR MEASURING SEMICONDUCTOR
摘要
申请公布号
JPH02203278(A)
申请公布日期
1990.08.13
申请号
JP19890024898
申请日期
1989.02.02
申请人
NEC YAMAGATA LTD
发明人
SANADA KENICHI
分类号
G01R1/067
主分类号
G01R1/067
代理机构
代理人
主权项
地址
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