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发明名称
GLOW-DISCHARGE DECOMPOSING DEVICE
摘要
申请公布号
JPH02250975(A)
申请公布日期
1990.10.08
申请号
JP19890071328
申请日期
1989.03.23
申请人
KYOCERA CORP
发明人
HIGUCHI HISASHI
分类号
C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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