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经营范围
发明名称
MASS FLOW CONTROLLER
摘要
申请公布号
JPH02277539(A)
申请公布日期
1990.11.14
申请号
JP19890099158
申请日期
1989.04.19
申请人
STEC KK
发明人
YAMAGUCHI MASAO;SHIMOMURA MITSUZO
分类号
B01J4/02;G05D7/06
主分类号
B01J4/02
代理机构
代理人
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地址
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