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发明名称
DRY-ETCHING PROCESS
摘要
申请公布号
JPH02285634(A)
申请公布日期
1990.11.22
申请号
JP19890108165
申请日期
1989.04.27
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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