DRY ETCHING OF BARRIER METAL/ALUMINUM LAMINATED FILM,申请号JP19890111247-传众专利搜索

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发明名称	DRY ETCHING OF BARRIER METAL/ALUMINUM LAMINATED FILM
摘要
申请公布号	JPH02291131(A)	申请公布日期	1990.11.30
申请号	JP19890111247	申请日期	1989.04.28
申请人	SONY CORP	发明人	FUJINOHARA TOMOYOSHI
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;H01L23/52	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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