发明名称 HYDROXY-RESINOUS BINDER MATERIALS CONTAINING BOUND AZO PHOTOSENSITIZER, METHOD AND USE
摘要 HYDROXY-RESINOUS BINDER MATERIALS CONTAINING BOUND AZO PHOTOSENSITIZER, METHOD AND USE A photosensitive alkali-soluble, thermally-stable fluorinated hydroxy-resinous polyamide or polyimide composition comprising a resin-bound diazo sensitizer incorporated by the reaction of a diazo sensitizer compound with a predetermined percentage of the hydroxy groups of the hydroxy-resin binder material. The present compositions are self-sensitized, have adjustable alkali-solubility and provide high speed photoresist compositions for producing relief patterns having good edge definition and high thermal stability.
申请公布号 CA2018052(A1) 申请公布日期 1990.12.08
申请号 CA19902018052 申请日期 1990.06.01
申请人 HOECHST CELANESE CORPORATION 发明人 KHANNA, DINESH N.
分类号 G03F7/021;C08G69/32;C08G73/10;C08K5/42;C08L77/00;C08L77/06;C08L79/08;G03F7/023;G03F7/037;G03F7/038;H01L21/027;(IPC1-7):C08G69/48;G03C1/73 主分类号 G03F7/021
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