发明名称 |
HYDROXY-RESINOUS BINDER MATERIALS CONTAINING BOUND AZO PHOTOSENSITIZER, METHOD AND USE |
摘要 |
HYDROXY-RESINOUS BINDER MATERIALS CONTAINING BOUND AZO PHOTOSENSITIZER, METHOD AND USE A photosensitive alkali-soluble, thermally-stable fluorinated hydroxy-resinous polyamide or polyimide composition comprising a resin-bound diazo sensitizer incorporated by the reaction of a diazo sensitizer compound with a predetermined percentage of the hydroxy groups of the hydroxy-resin binder material. The present compositions are self-sensitized, have adjustable alkali-solubility and provide high speed photoresist compositions for producing relief patterns having good edge definition and high thermal stability.
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申请公布号 |
CA2018052(A1) |
申请公布日期 |
1990.12.08 |
申请号 |
CA19902018052 |
申请日期 |
1990.06.01 |
申请人 |
HOECHST CELANESE CORPORATION |
发明人 |
KHANNA, DINESH N. |
分类号 |
G03F7/021;C08G69/32;C08G73/10;C08K5/42;C08L77/00;C08L77/06;C08L79/08;G03F7/023;G03F7/037;G03F7/038;H01L21/027;(IPC1-7):C08G69/48;G03C1/73 |
主分类号 |
G03F7/021 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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