| 发明名称 |
Wafer etching, cleaning and stripping apparatus |
| 摘要 |
A wafer stripping, cleaning and etching apparatus includes a bowl, a table in the bowl carrying cassette of wafers, and a spray post with multiple fluid passages and ports directing fluid spray against the wafers.
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| 申请公布号 |
US4982753(A) |
申请公布日期 |
1991.01.08 |
| 申请号 |
US19880253911 |
申请日期 |
1988.10.06 |
| 申请人 |
NATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
GREBINSKI, JR., THOMAS J.;STEPHENSON, SAMUEL H. |
| 分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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