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发明名称
ION ASSISTED SPUTTERING DEVICE
摘要
申请公布号
JPH03111562(A)
申请公布日期
1991.05.13
申请号
JP19890247955
申请日期
1989.09.26
申请人
UBE IND LTD
发明人
YAMAMOTO KIMISUMI;NAKAJIMA KOJI
分类号
C23C14/34;C23C14/35
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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