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发明名称
LIQUID EPITAXIAL GROWTH DEVICE
摘要
申请公布号
JPH03187216(A)
申请公布日期
1991.08.15
申请号
JP19890326244
申请日期
1989.12.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
SENBA SHINJI
分类号
H01L21/208;H01L21/368
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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