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发明名称
FORMATION OF HARD CARBON FILM
摘要
申请公布号
JPH03199376(A)
申请公布日期
1991.08.30
申请号
JP19890340361
申请日期
1989.12.27
申请人
SHIMADZU CORP
发明人
UKON YASUKI;OKADA SHIGENOBU
分类号
C23C16/26;C23C16/27;C23C16/511
主分类号
C23C16/26
代理机构
代理人
主权项
地址
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