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发明名称
REMOVAL OF COATING FILM ON SILICON LAYER AND SELECTIVE REMOVAL OF SILICON NATURAL OXIDE FILM
摘要
申请公布号
JPH03204932(A)
申请公布日期
1991.09.06
申请号
JP19890267777
申请日期
1989.10.14
申请人
DAINIPPON SCREEN MFG CO LTD;WATANABE NOBUATSU
发明人
IZUMI AKIRA;KIRIE KEIJI;WATANABE NOBUATSU;TEI YOUHOU
分类号
H01L21/308;H01L21/304
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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