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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03237728(A)
申请公布日期
1991.10.23
申请号
JP19900034337
申请日期
1990.02.14
申请人
MATSUSHITA ELECTRON CORP
发明人
MITSUSHIMA TAKESHI;OISHI HIROSHI;MAYUMI SHUICHI;UEDA SEIJI
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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