| 摘要 |
<p>PURPOSE:To conduct operation, in which wafers are shifted to a board formed at pitches narrower than a wafer cassette, automatically, and to save the labor of operation and improve efficiency by altering a wafer group, held on the wafer cassette at regular intervals, at the regular intervals of pitches narrower than the wafer cassette by a pitch changing plate and shifting the wafer group to the board. CONSTITUTION:A movable carriage 11 is supported by a pair of rails 10 and 10 in the transfer line 4 of a wafer cassette 1, and the transfer line 4 is moved along the parallel direction of wafers A. A board 2 is moved in the parallel direction of the wafers A by a pair of rails 12, 12 and a movable carriage 13 in the same manner even in the transfer line 5 of the board 2. A pair of pitch changing plates 7 are fixed at the upper ends of struts 14, and arranged in opposite positions on both sides in the diametral direction of the wafers A in the upper section of the wafer cassette 1 stopped at the position X of shifting. Both pitch changing plates 7, 7 are faced oppositely at intervals slightly narrower than the diameter of the wafers A, and a large number of pitch changing grooves 15, 15, into which both side sections of the outer circumferences of the wafers A lifted between both plates 7, 7 are fitted, are formed along the vertical direction to oppositely faced surfaces.</p> |
