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发明名称
FORMATION OF POLYIMIDE FILM
摘要
申请公布号
JPH03275178(A)
申请公布日期
1991.12.05
申请号
JP19900076417
申请日期
1990.03.26
申请人
FUJITSU LTD
发明人
NAKAGAMI YOSHIMASA
分类号
B05D3/02;B05D7/24;C09D167/00;C09D179/08;H01L21/312
主分类号
B05D3/02
代理机构
代理人
主权项
地址
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