| 摘要 |
PURPOSE:To obtain a sample positioner for a double-side aligner which contributes much to the manufacture of a product from a speedup of a manufacturing cycle to a reduction in the manufacturing cost by installing an adjustment device to move a mounting device, which is installed on a main body of a stage and which is equipped with sample holding pawls, in the X and Y directions and to rotate it on an X-Y plane. CONSTITUTION:An upper mask holder 61 is brought down toward a sample S until it is quite near to come into contact with the sample or it contacts the sample very slightly. A lower mask holder 62 is positioned at the specified place under the stage board 2. Seeing through a microscope 60, the sample is moved slightly to adjust upper and lower mask patterns to alightment marks of the sample S. In the movement in the X- and Y-axis directions, the operation of an X operation axis 31 and a Y operation axis 25 moves a pair of holding pawls 6 and 7 as one body. To rotate the sample in the psi direction around the end 4 of a first holding pawl, a psi operation axis is operated. Needless to say, the first holding pawl 6 can be moved in the reverse Y-axis direction as a second holding pawl 7. In the case that the sample is square, the curved ends 4 and 5 of the holding pawls 6 and 7 should be in the shape of an arc planely to rotate the sample in the psi direction. |
