| 发明名称 |
D.C. REACTIVELY SPUTTERED ANTIREFLECTION COATINGS |
| 摘要 |
A multilayer antireflection coating (20) designed for deposition in in-line coating machines by DC reactive sputtering. About half of the total thickness of the coating (20) may be formed from zin c oxide which has a high sputtering rate.
|
| 申请公布号 |
CA2070637(A1) |
申请公布日期 |
1992.04.12 |
| 申请号 |
CA19912070637 |
申请日期 |
1991.10.10 |
| 申请人 |
VIRATECH THIN FILMS, INC. |
发明人 |
DICKEY, ERIC R. |
| 分类号 |
G02B5/28;C03C17/34;G02B1/11;(IPC1-7):G02B1/10 |
主分类号 |
G02B5/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
