| 摘要 |
PURPOSE:To provide developing solution for positive type photo regist which can increase the dissolving speed of a regist exposure section and also can enhance a developing efficiency by adding specified interfacial active agent into developing solution composed of alkali metallic hydroxide water solution. CONSTITUTION:Anion interfacial active agent composed of sulfonate and/or sulfate is constituted to be contained in alkali metallic hydroxide water solution. In this case, the dissolving speed of a regist exposure section is extremely increased with no residual film left after developing has been carried out, as compared with that by developing solution composed of only alkali metallic hydroxide water solution. Sodium hydroxide, potassium hydroxide and the like are most preferable as alkali metallic hydroxides to be used for developing solution under this constitution, and the concentration of water solution shall be 1 to 5%. Alkyldiphenyldisulfonate sodium and the like are most suitable as interfacial active agent, and 0.01 to 10% interfacial active agent by weight shall be added to developing solution. |
