| 摘要 |
A coordinate measuring machine (10) having laser interferometers (80, 176, 196) arranged to measure "X" and "Y" carriage (52, 16) and probe shaft (56) motions, in which fiber optic cables (66, 72) are used to deliver a laser beam from a laser beam generator (60) to at least some of the interferometers (17). A special clamp (76) and adjustment flexure (74) is used to mount and align the fiber optics (66, 72) to beam splitters (64) dividing the laser beam from the laser generator (60) for use along each axis. The adjusting flexure (74) comprises a series of plate sections (120, 122, 124) interconnected with a pair of webs (142, 164) allowing tilting about two orthogonal axes with a pair of adjusting screws (148). A pair of locking straps (154) secure the plates (120, 122, 124) in the adjusted position. A double clamp (76) having axially spaced clamping jaws (102, 104) is connected to the flexure (74) and provides a stable securement of the optical coupling (96) to the flexure (74).
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