| 摘要 |
PURPOSE: To provide a low-cost apparatus for accurately optically measuring the pressure difference of media. CONSTITUTION: The apparatus optically measures the pressure differenceδp in media by using a Fabry-Perot interferometer 9. The apparatus comprises a plate 1 of parallel transparent surfaces having a first mirror 7, a second mirror 8 disposed on a measuring film 4 to displace perpendicularly to the mirror flat surface in an optical axis 10 so that the pressure difference is converted into a film moving amount via the film 4. To prevent the mechanical residual stress of the film 4, the area of the film 4 of the plate 2 is reduced to a predetermined thickness. The material of the plate 2 is the material of the film 4 formed by the plate 2 without joint at the entire periphery.
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