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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04258152(A)
申请公布日期
1992.09.14
申请号
JP19910019820
申请日期
1991.02.13
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ITO YUTAKA
分类号
H01L21/304;H01L21/84
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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