RADIATION-SENSITIVE ESTER AND PROCESS FOR ITS PREPARATION

摘要

The invention relates to a radiation-sensitive ester which is the condensation product of (a) a compound containing 2 to 6 aromatic hydroxyl groups, (b) a ringsubstituted (o-naphthoquinone 2-diazide)-4-sulfonic acid (compound D1) and (c) an (o-naphthoquinone 2-diazide)-4-or -5-sulfonic acid which is not further substituted (compound D2) and/or a non-radiation-sensitive organic acid (compound D0), where the (b):(c) molar ratio is between 0.1:1 and 39:1.