GENERATING PROBING MAP INCLUDING TOUCHDOWNS FREE OF DISABLED PROBING SITE

摘要

A wafer is probed using a probe card including a plurality of probing sites following a first probing map in which touchdowns of the probe card involve the plurality of probing sites to identify faulty locations. Whether at least one faulty site exists is determined based on the faulty locations. When the at least one faulty site exists, a second probing map in which each touchdown is free of at least one disabled probing site including the at least one faulty site is obtained. The second probing map is selected when a first criterion formed using a first touchdown count (TDC) in the first probing map, a second TDC in the second probing map, a third TDC based on re-probing the faulty locations and a fourth TDC based on re-probing a portion of the faulty locations not induced by the at least one faulty site is met.

主权项

1. A method, comprising:
probing a first wafer using a probe card comprising a plurality of probing sites following a first probing map in which touchdowns of the probe card involve the plurality of probing sites to identify a plurality of first faulty locations in the first wafer; determining, based on the plurality of first faulty locations, whether at least one faulty site exists in the plurality of probing sites; when the at least one faulty site exists in the plurality of probing sites,
obtaining, using at least one processor, a second probing map in which each touchdown of the probe card is free of at least one disabled probing site in the plurality of probing sites, wherein the at least one disabled probing site comprises the at least one faulty site; andselecting the second probing map for probing a second wafer when a first criterion formed using a first touchdown count in the first probing map, a second touchdown count in the second probing map, a third touchdown count determined based on re-probing the plurality of first faulty locations and a fourth touchdown count determined based on re-probing a portion of the plurality of first faulty locations not induced by the at least one faulty site is met.