PRODUCTION OF QUARTZ GLASS HAVING HIGH OH GROUP CONTENT

摘要

PURPOSE:To obtain SiO2 glass having a high OH group content and fit for transmission in a UV region. CONSTITUTION:A plasma flame 4 is generated with a plasma generator 3 in a steam atmosphere and an Si compd. such as SiCl4 and O2 are fed into the plasma flame 4 from a pipe 5 and brought into a thermal oxidation reaction in the steam atmosphere to form transparent SiO2 glass contg. many OH groups. This glass is deposited on the tip of a starting member 2 to produce a preform 8 made of SiO2 glass having such a high OH group content as about. 800-1,000ppm.