摘要 |
A high percentage bandwith microwave filter network, according to an embodiment of the present invention, comprises a T-network of capacitors implemented with thin-film techniques by applying a groundplane to one side of an alumina substrate and a first plate to the other side. A silicon nitride dielectric layer having a high density of capacitance is deposited over the first plate, and then a second and third capacitor plate are deposited on the dielectric over the first plate.
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