发明名称 THIN-FILM RESISTOR AND MANUFACTURE THEREOF
摘要 <p>PURPOSE:To provide a resistor which has a small change in resistance value due to heat treatment by adding aluminum to an alloy which is composed mainly of chromium and silicon. CONSTITUTION:Aluminum is added to an alloy which is composed mainly of chromium and silicon. When the total amount of chromium and silicon is 50 pts.wt. or above and aluminum is 50 pts.wt. or below, a resistor of a specific resistance 100muOMEGA.cm or above is obtained. In the case that 5-50 pts.wt. of aluminum is added to an alloy which is composed mainly of chromium and silicon, a change in sheet resistance value is small, 5% or below, before and after heat treatment. By this method, a stable resistor which has a small change in sheet resistance value before and after heat treatment can be obtained and trimming can be eliminated from the process.</p>
申请公布号 JPH056802(A) 申请公布日期 1993.01.14
申请号 JP19910315998 申请日期 1991.11.29
申请人 HITACHI LTD 发明人 OKADA NOBUSUKE;INOUE KOICHI;ENDO TSUNEO
分类号 H01C7/00;H01C17/12 主分类号 H01C7/00
代理机构 代理人
主权项
地址