TREATMENT MEMBER FOR SEMICONDUCTOR USE

摘要

PURPOSE:To enhance the corrosion resistance of a treatment member for semiconductor use such as a susceptor or the like and to ensure the flatness of the treatment member. CONSTITUTION:A treatment member for semiconductor use is provided with the following: a base material 1 having a prescribed shape; and a fine crystalline SiC layer 3 and a coarse crystalline SiC layer 2 which have been laminated and formed on the base material 1. It is featured in such a way that an intermediate layer 4 in which the continuity of a crystal structure is scarce is provided between the fine crystalline SiC layer 3 and the coarse crystalline SiC layer 2.