WAFER HOLDER WITH SHUTTER

摘要

PURPOSE:To provide the title wafer holder having a shutter function capable of rapidly isolating the wafer in a specimen chamber from an atmospheric gas or exposing in the same. CONSTITUTION:The title wafer holder is composed of a specimen chamber 21 containing a wafer 2, a film 10 capable of opening and closing the aperture part of the specimen chamber 21 and a holder base having a control circuit electrostatically driving the film 10. In such a constitution, the aperture part of the specimen chamber 21 can be opened and closed by the film 10 so that the surface of the wafer 2 in the specimen chamber 21 may be exposed in or isolated from an atmospheric gas.