| 摘要 |
PURPOSE:To enhance availability factor and safety by disposing a main gas supply cylinder and an auxiliary gas supply cylinder in parallel as a gap supply source and thus changing over to the auxiliary gas supply cylinder at the time of cylinder replenishment in a gas supply device for a semiconductor apparatus. CONSTITUTION:In a gas supply source 13 wherein a main gas supply cylinder 13a and an auxiliary gas supply cylinder 13b of smaller capacity are juxtaposed, both cylinders 13a, 13b are mutually connected in parallel through a main branch pipe 20, a main valve 19, a branch pipe 18, an auxiliary valve 21, etc. The other end of the branch pipe 18 is connected to a production apparatus 15 through a main pipe 16. The capacity of the auxiliary gas supply cylinder 13b is such a quantity as can operate the production apparatus 15 when the empty main gas supply cylinder 13a is being replenished. When the main gas supply cylinder 13a becomes empty, the main valve 19 is closed and the auxiliary valve 21 is opened, so that gas from the auxiliary gas supply cylinder 13b is supplied and by opening an entry valve 23a, the main gas supply cylinder is replenished. replenishment of the auxiliary gas supply cylinder 13b is made by opening an inlet valve 23b while the main gas supply cylinder 13a is being used. |
