| 摘要 |
<p>PURPOSE:To improve the exposure efficiency by applying a coating liquid composed of specific components to the surface of a transparent substrate, baking the coating to vitrify the component, contacting Ag ion to effect the ion exchange and irradiating the obtained Ag ion-containing glass film with electron beam. CONSTITUTION:A coating liquid is prepared by adding a salt capable of forming an alkali metal ion and Cl ion to a hydrolyzed solution of an Si alkoxide and mixing the mixture. A transparent substrate 2 having high ultraviolet transmittance (e.g. quartz glass plate) is immersed in the coating liquid to form a film of 0.1-1.5mum thick on the surface. After heating and drying the film, the product is baked at 200-1000 deg.C to vitrify the coating component obtaining a transparent substrate 1 having a glass film 3. The substrate is immersed in a molten salt 4 containing Ag ion such as AgNO3 to effect the ion exchange of the alkali metal ion in the glass film 3 to the Ag ion and introduce Ag ion into the glass film. Carbon is deposited on the surface to form an electrically conductive film 7, selectively irradiated with electron beam 5 to color the irradiated part 6 and etched with O2 plasma to remove the unnecessary part and obtain a colored pattern.</p> |
