| 摘要 |
<p>PURPOSE:To make a wafer chuck light in weight and to make a resolving power stable. CONSTITUTION:A wafer chuck 1 is made light in weight by cutting a useless part thereof, while a contact surface is lessened by increasing a vacuum groove 2 in a chuck surface with which the rear of a wafer comes into contact. This constitution produces the effects of reduction of a vacuum error, a reproducing operation, the saving of articles of consumption, and the improvement of a product processing capacity, etc.</p> |
