| 摘要 |
Pressure-Measuring Arrangement with High Linearity A pressure-measuring arrangement has a pressure sensor structure with a pressure-dependent measuring capacitance, a pressure-independent reference capacitance, and an evaluating circuit which derives the pressure from a capacitance measurement. To reduce the linearity error, according to the inventive pressure-measuring arrangement, a further capacitance is implemented as a pressure-dependent capacitance with a further electrode formed on the diaphragm of the pressure sensor structure, with the measuring electrode and the further electrode having angular extensions changing oppositely to each other as a function of the radius, and the transfer function of the evaluating circuit being proportional to the difference between the measuring capacitance and the constant reference capacitance and inversely proportional to the pressure-dependent further capacitance.
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