FORMING METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19910336346-传众专利搜索

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发明名称	FORMING METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH05152438(A)	申请公布日期	1993.06.18
申请号	JP19910336346	申请日期	1991.11.26
申请人	NEC CORP	发明人	OKAMURA HITOSHI
分类号	H01L21/82;G06F1/10;G06F17/50;H01L21/822;H01L27/04;H01L27/118	主分类号	H01L21/82
代理机构		代理人
主权项
地址

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