| 摘要 |
<p>PURPOSE:To attain the focusing of a microscope, etc., in a short time, to increase the material processing quantity (throughput) per unit hour processed by using the microscope, etc., on a manufacturing process, and to improve productivity. CONSTITUTION:This device is provided with an optical system 1 which is set opposed to a sample 9 an which approaches to and separates from the sample 9, a condensing means 2 having a slit 21 moving in a direction extended in one direction, a photoelectric converting type image obtaining means 3 provided on the focusing position of an eyepiece, a sample observing means driving means 5 making a sample observing means approach and separate with respect to the sample 9, a condensing means driving means 6 moving the condensing means 2 in synchronism with the means 5, and a focusing means 7 mutually comparing the information which is detected by the means 3 with the information obtained by means 3 in the elapse of time, deciding a position where a focusing information signal is maximum strength and fixing the sample observation means on the position.</p> |
