| 摘要 |
PURPOSE: To compactly constitute a vacuum processing apparatus having a plurality of stations, to reduce volume to be conditioned and to secure excellent sealing performance. CONSTITUTION: An article to be processed 21 is processed at two stations 7, 27 and each station 7, 27 has a charging and/or removing openings 13, 25 for the article 21. A transporting device (3, 5, 7, 23) is rotably supported and includes a holding device 19 which is successively moved to the openings 13, 25 of the stations. The process plant is designed in such a manner that surface normals A13 , A25 defined by surfaces of the openings 13, 25 and the space axis A defined by the axis of rotation 3 of the transporting device do not run parallel and rather form together an angle of 90 deg. or 45 deg.. |
