| 摘要 |
<p>PURPOSE: To microminiaturize an electron device, by providing an anode and a cathode onto a base board surface to cover them by first and second laminated corrosionproof layers, and remove part of the second layer to cause a wall between the anode and the cathode, after that providing a conductive layer onto the first corrosionproof layer, also a conductive side wall spacer, contacting the wall, onto the second remaining corrosionproof layer. CONSTITUTION: An anode 16, a grid 18, and an electron emitting cathode 20, nearing to the anode 16, and having a sharp tip 22% are provided onto the main surface 12 of a base board 14. The grid 18 is positioned between the anode 16 and the tip 22, and an overhead portion 19, for controlling an electric field in the tip 22, is provided here; and the grid 18 is positioned in both the sides of the portion 19 to be joined to a main surface 12, and the portion 19 is supported by two anchor portions 21. Thus a triode, to be an electric field effect emitter, is constituted to generate an electric field at the tip 22 by positive electric potential to be applied to the tip 22 and the grid 18. Here, the flying path of an electron, from the tip 22 to the anode 16, 18 selected optimumly, because the electron penetrates through when the electric field of the tip 22 exceeds about 1∼10<7> /cm.</p> |
