摘要 |
<p>PURPOSE:To prevent insulation degrading between cathodes from being caused by sputtering material from the cathodes due to a long period of use, by forming in a projected shape the top face of insulation glass on the periphery of a cath ode sleeve support. CONSTITUTION:Cathode electrodes 1 are arranged in a line and supported and fixed to a first grid electrode 8 through cathode sleeve support 2 and a cathode support 3. The cathode 1 are each composed of a cathode sleeve 4, a cathode base 5 welded and fixed thereto, and alkaline earth oxide 6 applied thereon, and in the sleeve 4 a heater 7 is inserted and welded and fixed to the support 3. Between the respective cathodes 1 the support 3 is formed in a projecting manner so as to prevent decrease in insulation caused by the sputtering material from the cathodes l1 after a long period of use. The reliability is improved accordingly.</p> |