| 摘要 |
<p>PURPOSE:To generate an uniform plasma and form a highly homogeneous thin film by providing, on an applicator, an input port capable of inputting microwaves from plural directions equally divided to a reaction tube. CONSTITUTION:The microwave oscillated by a microwave oscillator 1 and passed through an isolator 2 is divided into two by a T-type branched waveguide 10, and inputted to an applicator 5A through a waveguide system. The regulation of generation and generating position of plasma is conducted by the use of a phase shifter 11 and a matching equipment 4 while watching the indicating part of a power monitor 3. When the phase shift quantity of both waveguide systems are equal to each other, the maximum point of microwave electric field is generated at the center of the applicator 5A to form the optimum state for plasma generation, and a plasma is generated with the maximum microwave power. Thus, the plasma is generated with a low power and raised to a rated power while matching and regulating, and the instruction of the monitor 3 is similarly regulated. The plasma is uniformed, and a highly homogeneous thin film can be formed.</p> |
