摘要 |
<p>PURPOSE: To enable control of a relatively large fluid mass flow with a small structural height by providing a control mechanism having a displacer fluid motor through which the fluid stream flows and an actuating element directly lock or release a displacer element during operation. CONSTITUTION: In a piezoelectric valve, the actual control member 7 placed between an inlet port 3 and an outlet port 4 and the actuating member 8 for the control mechanism 7 are equipped. The control mechanism 7 is equipped with a displacer fluid motor 9 through which the fluid stream 5 flows. The piezoelectric actuating element 8 is disposed in the region of a displacer element 1, which can be moved by the fluid stream 5 and belongs to the displacer fluid motor 9, and can at least directly lock or release the displacer member 1 during operation. Thus a comparatively large fluid stream flow can be controlled by structural height as small as possible.</p> |