| 发明名称 |
OPTICAL ELEMENT AND MANUFACTURE THEREOF |
| 摘要 |
PURPOSE:To provide a method of manufacturing an optical element which can be monolithically formed together with a silicon semiconductor circuit on the same board. CONSTITUTION:An optical element contains SiOx (0<X<2) as component. The optical element is produced through a method composed of a first process where the surface of silicon is irradiated with oxygen atom or oxygen molecule 2 of high kinetic energy to inject oxygen into silicon and a second process where oxygen-injected silicon is thermally treated to combine oxygen and silicon together to form SiOx (0<x<2). |
| 申请公布号 |
JPH05218494(A) |
申请公布日期 |
1993.08.27 |
| 申请号 |
JP19920016522 |
申请日期 |
1992.01.31 |
| 申请人 |
CANON INC |
发明人 |
KUMOMI HIDEYA;YONEHARA TAKAO |
| 分类号 |
G02F1/01;H01L33/24;H01L33/34;H01L33/42;H01L33/50;H05B33/10 |
主分类号 |
G02F1/01 |
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