| 摘要 |
<p>PURPOSE:To attract a lot of chips arranged on a wafer so surely without disarraying their arrangement. CONSTITUTION:In a vacuum chuck suitable for suction of a semiconductor chip, an opening 10 and an air suction port 9 are installed in a box body 2 forming an empty space inside, and many capillaries 3 are fixed to the opening 10 parallelly and tightly. At that time, an air flowing port 11 at one end side of each capillary 3 is set up in the empty space 8, and a suction port at the other end side is projectingly set up outward from the box body 2. In succession, a flushed suction surface S is formed in the suction port of each capillary 3.</p> |
